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Brewer Science发布新型DBARC材料 成力行为艺术

[2019-05-16 00:39:48] 来源: 编辑: 点击量:
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导读: BrewerScience,Inc.,aleadingsupplierofadvancedlithographymaterials,hasreleasedARC?DS-K101Pdeveloper-solublebtomanti-reflectivecoatingDBARC.ThisDBARCproducthas

BrewerScience,Inc.,aleadingsupplierofadvancedlithographymaterials,hasreleasedARC?DS-K101Pdeveloper-solublebtomanti-reflectivecoatingDBARC.ThisDBARCproducthasbeenformulatedtomeettheneedsoftheKrFpholithographerandaugmentsprocesseswherethe成力行为艺术resistbudgetislimited.

BuiingonastronghistoryofcreatingDBARCs,BrewerSciencehasdevelopedapremiumveionofthesuessfulBrewerScience?ARC?DS-K101coating.ARC?DS-K101PKrFDBARCisdesignedtomeetthetighteningspecificationsofthe22-nmnodeandbeyond.ARC?DS-K101Pmaterial成力行为艺术haslessthan1ppbions,whilestillmaintainingthebroadresistpatiblyandtunabilityoftheindustry-provenARC?DS-K101coating.Thisnewpremiumproductwillenableexistingimplantprocessestotransfertofuturenodes.

BrewerSciencescontinusimprovementprocesssupportscustomewithnewleading-edgelithographyproducts,saysJimLamb,ManagingDirectorofProductManagementatBrewerScience.ARC?DS-K101PDBARCwascreatedtogivecustomeavaluedsolutionforlt;-nmCDprocessesforimplant,andaviablecostreductionfor成力行为艺术BEOLlaye.

ThetightnandkopticalconstantsofBrewerScience?ARC?DS-K101Pcoatingproveconsistentperformance,whiledevelopersolubilitycanimprovethroughputbyeliminatinganetchstep,whichreducesthecostofowneh.CallBrewerSciencetodaytolearnmore.

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